High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

Micromachines, Free Full-Text

Micromachines, Free Full-Text

Optimization of deep reactive ion etching for microscale silicon

Schematics and scanning electron micrographs showing pre

Figure 4 from Ultra high aspect-ratio and thick deep silicon

Optimization of deep reactive ion etching for microscale silicon

PDF) Towards the Fabrication of High-Aspect-Ratio Silicon Gratings

PDF) Recent Advances in Reactive Ion Etching and Applications of

Micromachines, Free Full-Text

Glass based micro total analysis systems: Materials, fabrication

High aspect ratio silicon ring-shape micropillars fabricated by

PDF) Micro Machining for Micro Electro Mechanical Systems (MEMS)